DocumentCode
402338
Title
Original MEMS-Based Single Pole Double Throw topology for millimeter wave space communications
Author
Dubuc, David ; Rabbia, Laurent ; Grenier, Karia ; Pons, Patrick ; Vendier, Olivier ; Graffeuil, J. ; Plana, Robert
Author_Institution
LAAS, CNRS, Toulouse, France
Volume
3
fYear
2003
fDate
7-9 Oct. 2003
Firstpage
979
Abstract
This paper presents the design, fabrication and characterization of a MEMS-Based Single Pole Double Throw (SPDT) circuit for millimeterwave applications. High performances are achieved thanks to an original circuit design based on MEMS synthesized quarter wave line combined with surface and bulk micromachinings of silicon. 0.6 dB insertion loss of the SPDT circuit was measured with an isolation of 21 dB at 30 GHz.
Keywords
capacitors; elemental semiconductors; isolation technology; micromachining; microswitches; millimetre wave devices; network topology; semiconductor thin films; silicon; 0.6 dB; 21 dB; 30 GHz; MEMS single pole double throw topology; Si; circuit design; insertion loss; micromachining; millimeter wave space communications; quarter wave line; silicon; Circuit synthesis; Circuit topology; Fabrication; Insertion loss; Micromachining; Micromechanical devices; Millimeter wave circuits; Performance evaluation; Silicon; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2003. 33rd European
Print_ISBN
1-58053-834-7
Type
conf
DOI
10.1109/EUMC.2003.177645
Filename
1262816
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