Fabrication and characterization of spinel magnetic nanoparticle thin film transmission lines

Author

Morton, Matthew A. ; Vestal, Christy R. ; Papapolymerou, John ; Zhang, Z. John

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

Volume

3

fYear

2003

fDate

7-9 Oct. 2003

Firstpage

1307

Abstract

Spinel magnetic nanoparticle thin films were fabricated on high resistivity silicon substrates. TRL (through-reflect-line) calibration standards for CPW lines were fabricated on samples of high resistivity silicon with and without the magnetic thin film. Measurements show an increase of approximately 0.3 in the effective combined dielectric/magnetic constant for a film thickness of 100 nm. Capacitors are fabricated to determine the relative permittivity of the thin film. The relative permeability is determined using comparisons of the measured effective dielectric/magnetic constant with simulated data.

Keywords

cobalt compounds; coplanar transmission lines; coplanar waveguides; dielectric materials; dielectric thin films; ferromagnetic materials; liquid phase deposition; magnetic particles; magnetic permeability; magnetic thin film devices; magnetic thin films; nanoparticles; nanotechnology; permittivity; thin film capacitors; 100 nm; CPW lines; CoFe₂O₄; Si; capacitors; dielectric/magnetic constant; high resistivity silicon substrate; relative permeability; relative permittivity; spinel magnetic nanoparticle thin film transmission lines; through reflect line calibration standard; Conductivity; Dielectric constant; Dielectric measurements; Dielectric substrates; Dielectric thin films; Fabrication; Magnetic films; Permittivity measurement; Silicon; Transmission lines;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2003. 33rd European

Print_ISBN

1-58053-834-7

Type

conf

DOI

10.1109/EUMC.2003.1262898

Filename

1262898