Title :
A grounded co-planar waveguide MEMS switch
Author :
Miyaguchi, Kenichi ; Yoshida, Yukihisa ; Nishino, Tamotsu ; Hangai, Masatake ; Suehiro, Yoshiyuki ; Lee, Sang-Seok ; Iida, Akio ; Ishida, Osami
Author_Institution :
Inf. Technol. R&D Center, Mitsubishi Electr. Corp., Kanagawa, Japan
Abstract :
A grounded co-planar (GCPW) MEMS switch is presented. The proposed switch has a movable SiN membrane with a signal line and ground lines above a dielectric-air-metal (DAM) cavity on which a ground metal is patterned, resulting in a structure of GCPW transmission line. The electrostatic force makes an RF short path to the ground metal on the bottom of the DAM cavity with metal-to-metal contact. The ground metal which covers silicon substrates makes the switch to be on a low-resistivity silicon substrate. The measured results of the switch validate the proposed structure of the switches utilizing the DAM cavity.
Keywords :
coplanar waveguides; microswitches; transmission lines; MEMS switch; RF short path; SiN; dielectric-air-metal cavity; electrostatic force; ground lines; ground metal; grounded coplanar waveguide; low-resistivity silicon substrate; metal-to-metal contact; movable SiN membrane; signal line; silicon substrates; transmission line; Biomembranes; Contacts; Coplanar transmission lines; Dielectric substrates; Electrostatic measurements; Microswitches; Radio frequency; Silicon compounds; Switches; Transmission line measurements;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.1262978
