Title :
A novel compact quasi planar silicon filter at 45 GHz based on metallic periodic structure
Author :
Ferrand, P. ; Chatras, M. ; Baillargeat, D. ; Blondy, P. ; Verdeyme, S. ; Puech, J. ; Lapierre, L.
Author_Institution :
Faculte des Sci. de Limoges, IRCOM-UMR, Limoges, France
Abstract :
A small size planar filter at 45 GHz with a 8% bandwidth at -3dB and 2.6dB insertion losses is presented. This filter is based on metallized holes periodic lattice that forms coupled silicon resonators. The structure is realized on a 430μm thick high resistivity silicon wafer using a wet etching process, the I/OCPW feeds are printed on the top of substrate.
Keywords :
elemental semiconductors; microwave filters; periodic structures; planarisation; resonators; silicon; 2.6 dB; 430 microns; 45 GHz; I-OCPW feeds; Si; coupled silicon resonators; high resistivity silicon wafer; insertion losses; metallic periodic structure; metallized holes periodic lattice; planar filter; quasiplanar silicon filter; wet etching process; Bandwidth; Conductivity; Feeds; Insertion loss; Lattices; Metallization; Periodic structures; Resonator filters; Silicon; Wet etching;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.1263012
