Narrow band micro-machined band pass filter and a surface-mountable topology

Author

Chatras, M. ; Blondy, P. ; Cros, D. ; Vendier, O. ; Drevon, C. ; Cazaux, J.L.

Author_Institution

IRCOM, Limoges, France

Volume

2

fYear

2003

fDate

7-9 Oct. 2003

Firstpage

813

Abstract

A 27.88 three-pole 1.8% bandwidth silicon micro-machined filter with 50 dB rejection is presented. On a single resonator, a quality factor of 602 has been measured and the filter exhibits 2.9 dB of insertion losses. A 30.04 GHz two-pole silicon micro-machined filter with a simple planar integration is also proposed. The excitation is made from the top of the shielding substrate of a membrane supported micro-machined filter. Packaging and inter-connection are included in the design. The whole filter exhibits 1.8 dB of insertion losses. Such filter can be easily integrated by flip-chip technology.

Keywords

band-pass filters; elemental semiconductors; micromachining; silicon; surface mount technology; 1.8 dB; 2.9 dB; 30.04 GHz; Si; flip-chip technology; insertion losses; narrow band micromachined band pass filter; planar integration; quality factor; shielding substrate; single resonator; surface-mountable topology; Band pass filters; Bandwidth; Biomembranes; Insertion loss; Loss measurement; Narrowband; Q factor; Resonator filters; Silicon; Topology;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2003. 33rd European

Print_ISBN

1-58053-834-7

Type

conf

DOI

10.1109/EUMC.2003.1263014

Filename

1263014