DocumentCode
402987
Title
Coupling issues in strongly confined nanophotonic waveguides
Author
Baets, R. ; Bienstman, P. ; Bogaerts, W. ; Taillaert, D. ; Luyssaert, B.
Author_Institution
IMEC, Univ. Gent, Belgium
Volume
1
fYear
2003
fDate
29 June-3 July 2003
Firstpage
191
Abstract
We present several devices to couple light efficiently into strongly confined nanophotonic waveguides (surface fibre coupler, compact spot-size converter). These devices are fabricated in SOI using deep-UV lithography.
Keywords
nanotechnology; optical couplers; optical fabrication; optical fibre couplers; optical waveguides; photonic crystals; silicon-on-insulator; ultraviolet lithography; SOI; Si-SiO2; compact spot-size converter; coupling; deep-UV lithography; strongly confined nanophotonic waveguides; surface fibre coupler; Gratings; Lithography; Optical coupling; Optical device fabrication; Optical fiber couplers; Optical fiber devices; Optical fiber polarization; Optical waveguides; Photonic crystals; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Transparent Optical Networks, 2003. Proceedings of 2003 5th International Conference on
Print_ISBN
0-7803-7816-4
Type
conf
DOI
10.1109/ICTON.2003.1264613
Filename
1264613
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