• DocumentCode
    403883
  • Title

    Tools and techniques for failure analysis and qualification of MEMS

  • Author

    Walraven, Jeremy A.

  • Author_Institution
    Sandia National Laboratories
  • Volume
    1
  • fYear
    2003
  • fDate
    Sept. 30-Oct. 2, 2003
  • Firstpage
    834
  • Lastpage
    842
  • Keywords
    Chemical analysis; Chemical technology; Electron optics; Failure analysis; Gears; Microelectromechanical devices; Micromechanical devices; Optical devices; Optical microscopy; Qualifications;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Test Conference, 2003. Proceedings. ITC 2003. International
  • ISSN
    1089-3539
  • Print_ISBN
    0-7803-8106-8
  • Type

    conf

  • DOI
    10.1109/TEST.2003.1271068
  • Filename
    1271068
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=403883