Title :
Tools and techniques for failure analysis and qualification of MEMS
Author :
Walraven, Jeremy A.
Author_Institution :
Sandia National Laboratories
fDate :
Sept. 30-Oct. 2, 2003
Keywords :
Chemical analysis; Chemical technology; Electron optics; Failure analysis; Gears; Microelectromechanical devices; Micromechanical devices; Optical devices; Optical microscopy; Qualifications;
Conference_Titel :
Test Conference, 2003. Proceedings. ITC 2003. International
Print_ISBN :
0-7803-8106-8
DOI :
10.1109/TEST.2003.1271068
