Title :
Mems manufacturing testing: an accelerometer case study
Author :
Maudie, Theresa ; Hardt, Alex ; Nielsen, Rick ; Stanerson, Dennis ; Bleschke, R. ; Miller, Mike
Author_Institution :
Motorola
fDate :
Sept. 30-Oct. 2, 2003
Keywords :
Accelerometers; Circuit testing; Computer aided software engineering; Costs; EPROM; Manufacturing; Micromechanical devices; System testing; Temperature sensors; Transducers;
Conference_Titel :
Test Conference, 2003. Proceedings. ITC 2003. International
Print_ISBN :
0-7803-8106-8
DOI :
10.1109/TEST.2003.1271069
