DocumentCode
403884
Title
Mems manufacturing testing: an accelerometer case study
Author
Maudie, Theresa ; Hardt, Alex ; Nielsen, Rick ; Stanerson, Dennis ; Bleschke, R. ; Miller, Mike
Author_Institution
Motorola
Volume
1
fYear
2003
fDate
Sept. 30-Oct. 2, 2003
Firstpage
843
Lastpage
849
Keywords
Accelerometers; Circuit testing; Computer aided software engineering; Costs; EPROM; Manufacturing; Micromechanical devices; System testing; Temperature sensors; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Conference, 2003. Proceedings. ITC 2003. International
ISSN
1089-3539
Print_ISBN
0-7803-8106-8
Type
conf
DOI
10.1109/TEST.2003.1271069
Filename
1271069
Link To Document