Title :
Low contact-force fritting probe card using buckling microcantilevers
Author :
Kataoka, Kenichi ; Ltoh, T. ; Suga, Tadatomo
Author_Institution :
Research Center for Advanced Science and Technology, University of Tokyo
fDate :
Sept. 30-Oct. 2, 2003
Keywords :
Atomic force microscopy; Atomic measurements; Current measurement; Electrical resistance measurement; Force measurement; Mechanical variables measurement; Micromechanical devices; Power measurement; Probes; Testing;
Conference_Titel :
Test Conference, 2003. Proceedings. ITC 2003. International
Print_ISBN :
0-7803-8106-8
DOI :
10.1109/TEST.2003.1271088
