Title :
Robust control approach to atomic force microscopy
Author :
Sebastian, Abu ; Salapaka, Murti V. ; Cleveland, Jason P.
Author_Institution :
Dept. of Electr. & Comput. Eng., Iowa State Univ., Ames, IA, USA
Abstract :
The imaging problem using an atomic force microscope (AFM) is addressed in the framework of modern robust control. Subsequently stacked H∞ and Glover McFarlane controllers are designed for high bandwidth and robustness. It is postulated that the sample profile can be accurately imaged without building explicit observers. Experimental results substantiate this claim.
Keywords :
H∞ control; atomic force microscopy; control system synthesis; micropositioning; robust control; AFM; Glover McFarlane controller design; H∞ controller design; atomic force microscope; high bandwidth; robust control; robust imaging; robustness; Adaptive control; Atomic force microscopy; Bandwidth; Control design; Modems; Optical feedback; Optical imaging; Optical noise; Robust control; Shape control;
Conference_Titel :
Decision and Control, 2003. Proceedings. 42nd IEEE Conference on
Print_ISBN :
0-7803-7924-1
DOI :
10.1109/CDC.2003.1271677
