DocumentCode
404005
Title
Robust control approach to atomic force microscopy
Author
Sebastian, Abu ; Salapaka, Murti V. ; Cleveland, Jason P.
Author_Institution
Dept. of Electr. & Comput. Eng., Iowa State Univ., Ames, IA, USA
Volume
4
fYear
2003
fDate
9-12 Dec. 2003
Firstpage
3443
Abstract
The imaging problem using an atomic force microscope (AFM) is addressed in the framework of modern robust control. Subsequently stacked H∞ and Glover McFarlane controllers are designed for high bandwidth and robustness. It is postulated that the sample profile can be accurately imaged without building explicit observers. Experimental results substantiate this claim.
Keywords
H∞ control; atomic force microscopy; control system synthesis; micropositioning; robust control; AFM; Glover McFarlane controller design; H∞ controller design; atomic force microscope; high bandwidth; robust control; robust imaging; robustness; Adaptive control; Atomic force microscopy; Bandwidth; Control design; Modems; Optical feedback; Optical imaging; Optical noise; Robust control; Shape control;
fLanguage
English
Publisher
ieee
Conference_Titel
Decision and Control, 2003. Proceedings. 42nd IEEE Conference on
ISSN
0191-2216
Print_ISBN
0-7803-7924-1
Type
conf
DOI
10.1109/CDC.2003.1271677
Filename
1271677
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