A 94 GHz 3D Image Radar Engine With 4TX/4RX Beamforming Scan Technique in 65 nm CMOS Technology

This paper presents a fully-integrated 3D image radar engine utilizing beamforming for electrical scanning and precise ranging technique for distance measurement. Four transmitters and four receivers form a sensor frontend with phase shifters and power combiners adjusting the beam direction. A built-in 31.3 GHz clock source and a frequency tripler provide both RF carrier and counting clocks for the distance measurement. Flip-chip technique with low-temperature co-fired ceramic (LTCC) antenna design creates a miniature module as small as 6.5 × 4.4 × 0.8 cm³. Designed and fabricated in 65 nm CMOS technology, the transceiver array chip dissipates 960 mW from a 1.2-V supply and occupies chip area of 3.6 × 2.1 mm 2. This prototype achieves ±28° scanning range, 2-m maximum distance, and 1 mm depth resolution.