Title :
Characteristics of a polyimide-hinged MEMS beam scanner for location-based information services
Author :
Itoh, Hideo ; Uchiyama, Akio ; Nakamura, Yoshiyuki ; Yamamoto, Yoshinobu ; Nishimura, Takuichi ; Nemoto, Toshio ; Nakashima, Hideyulu ; Iwasaki, Nobuyoshi
Author_Institution :
Cyber Assist Res. Center AIST, Tokyo, Japan
Abstract :
Characteristics of a polyimide-hinged MEMS mirror is reported for vector scanning of eye-safe laser beam with larger angle. This MEMS mirror is used as a beam steering element of indoor laser radar communication system.
Keywords :
beam steering; laser beams; micromechanical devices; micromirrors; optical communication; optical information processing; optical polymers; optical radar; optical scanners; MEMS mirror; beam steering element; eye-safe laser beam; indoor laser radar communication system; location-based information service; polyimide-hinged MEMS beam scanner; vector scanning; Beam steering; Fasteners; Laser beams; Laser feedback; Laser radar; Micromechanical devices; Mirrors; Optical sensors; Silicon; Voltage;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1274518
