Title :
Control of SOI waveguide polarization properties for microphotonic applications
Author :
Xu, D.-X. ; Cheben, P. ; Janz, S. ; Dalacu, D.
Author_Institution :
Inst. for Microstructural Sci., Nat. Res. Council of Canada, Ottawa, Ont., Canada
Abstract :
Waveguide birefringence in SOI AWGs was studied for different cross-sections. It was found that trapezoidal shapes are less sensitive to dimension fluctuations, and can be used to relax the dimension control requirements. Top oxide cladding induced significant photoelastic birefringence. We demonstrated the use of this property for birefringence tuning, which we believe opens a new avenue of birefringence control for microphotonic applications.
Keywords :
arrayed waveguide gratings; integrated optics; mechanical birefringence; silicon-on-insulator; SOI AWG; SOI waveguide polarization properties control; birefringence control; birefringence tuning; dimension fluctuation; microphotonic application; photoelastic birefringence; top oxide cladding; trapezoidal shapes; waveguide birefringence; Birefringence; Capacitive sensors; Councils; Dry etching; Photoelasticity; Polarization; Shape control; Stress control; Tensile stress; Wet etching;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1274524
