Title :
Design, test and qualification of stiction-free MEMS optical switches
Author :
Su, Guo-Dung John ; Jiang, Fukang ; Chiu, E. ; Avakian, A. ; Dickson, J. ; Jia, D. ; Tsao, T.
Author_Institution :
Umachines Inc., Pasadena, CA, USA
Abstract :
This paper describes the design, test and qualification of MEMS optical switches developed at Umachines, Inc. The mirror monolithically integrated with MEMS actuator is driven by electromagnetic force and is perpendicular to light path during movement. Low voltage (< 1V) and low current (<10 mA) requirement of the MEMS actuators simplifies the control electronic circuits. Fully packaged 2×2 add/drop switches have passed rigorous Telcordia™ GR-1221.
Keywords :
electric actuators; electromagnetic forces; micromechanical devices; monolithic integrated circuits; optical elements; optical switches; stiction; MEMS actuator; MEMS optical switches; Telcordia™ GR-1221; Umachines; add/drop switches; control electronic circuits; electromagnetic force; fully packaged; light path; low current; low voltage; monolithically integrated; Actuators; Circuit testing; Electromagnetic forces; Low voltage; Micromechanical devices; Mirrors; Optical design; Optical switches; Qualifications; Voltage control;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1274564
