Title :
Design and characterization of electrothermal actuator from reliability and robust aspects
Author :
Lai, Yen-Jyh ; Wu, Chia-Yu ; Lee, Chengkuo ; Lin, Yu-Shen ; Chen, Wen-Chih ; Chen, Chihchung ; Huang, Ruey-Shing ; Lin, Min-Shyong
Author_Institution :
Asia Pacific Microsyst. Inc., Hsinchu, Taiwan
Abstract :
We propose a layout design for U-shape electrothermal to overcome the severe sticking problem induced by the accumulated charge. Then, we suggest proper device parameter designs for unloaded and heavily loaded applications.
Keywords :
actuators; micromechanical devices; optical design techniques; reliability; U-shape electrothermal; charge accumulation; electrothermal actuator; layout design; loaded application; parameter design; reliability; robust aspect; sticking problem; Actuators; Asia; Electrostatics; Electrothermal effects; Fabrication; Microelectromechanical devices; Research and development; Robustness; Space charge; Voltage;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1274568
