Title :
Implementation process of a reflective-type electrical tunable SOI optical filter
Author :
Tsao, Shyh-Lin ; Hu, Shu-Fen ; Tien, Jiang-Hung ; Tsai, Chun-Wei
Author_Institution :
Opt. Fiber Syst. Lab., Nat. Taiwan Normal Univ., Taipei, Taiwan
Abstract :
In this paper, we implement a wavelength tunable filter based on polysilicon covered SOI wafer. The SOI filter is achieved by e-beam writing a reflective wavelength tunable grating on MMI SOI waveguide.
Keywords :
optical filters; optical polymers; optical tuning; optical waveguides; rib waveguides; silicon-on-insulator; MMI SOI waveguide; SOI filter; e-beam writing; implementation process; reflective-type electrical tunable SOI optical filter; wavelength tunable filter; Crystallization; Electron beams; Gratings; Laboratories; Optical fiber devices; Optical filters; Optical waveguides; Silicon on insulator technology; Tunable circuits and devices; Writing;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1274739
