• DocumentCode
    405499
  • Title

    Implementation process of a reflective-type electrical tunable SOI optical filter

  • Author

    Tsao, Shyh-Lin ; Hu, Shu-Fen ; Tien, Jiang-Hung ; Tsai, Chun-Wei

  • Author_Institution
    Opt. Fiber Syst. Lab., Nat. Taiwan Normal Univ., Taipei, Taiwan
  • Volume
    1
  • fYear
    2003
  • fDate
    15-19 Dec. 2003
  • Abstract
    In this paper, we implement a wavelength tunable filter based on polysilicon covered SOI wafer. The SOI filter is achieved by e-beam writing a reflective wavelength tunable grating on MMI SOI waveguide.
  • Keywords
    optical filters; optical polymers; optical tuning; optical waveguides; rib waveguides; silicon-on-insulator; MMI SOI waveguide; SOI filter; e-beam writing; implementation process; reflective-type electrical tunable SOI optical filter; wavelength tunable filter; Crystallization; Electron beams; Gratings; Laboratories; Optical fiber devices; Optical filters; Optical waveguides; Silicon on insulator technology; Tunable circuits and devices; Writing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
  • Print_ISBN
    0-7803-7766-4
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2003.1274739
  • Filename
    1274739
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=405499