• DocumentCode
    405511
  • Title

    Measurement accuracy of profilometry based on two-photon absorption

  • Author

    Sako, Naoya ; Imoto, Soichiro ; Tanaka, Yosuke ; Kurokawa, Takashi

  • Author_Institution
    Tokyo Univ. of Agric. & Technol., Japan
  • Volume
    1
  • fYear
    2003
  • fDate
    15-19 Dec. 2003
  • Abstract
    We evaluated the measurement accuracy of the profilometry based on two-photon absorption It was confirmed that the measurement accuracy was inversely proportional to distance and scanning frequency range, and it was typically the order of 10-4 for about 1 m.
  • Keywords
    Mach-Zehnder interferometers; photodetectors; two-photon processes; measurement accuracy; profilometry; scanning frequency range; two-photon absorption; Absorption; Dynamic range; Frequency measurement; Intensity modulation; Light sources; Optical modulation; Optimized production technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
  • Print_ISBN
    0-7803-7766-4
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2003.1274756
  • Filename
    1274756
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=405511