Title :
Measurement accuracy of profilometry based on two-photon absorption
Author :
Sako, Naoya ; Imoto, Soichiro ; Tanaka, Yosuke ; Kurokawa, Takashi
Author_Institution :
Tokyo Univ. of Agric. & Technol., Japan
Abstract :
We evaluated the measurement accuracy of the profilometry based on two-photon absorption It was confirmed that the measurement accuracy was inversely proportional to distance and scanning frequency range, and it was typically the order of 10-4 for about 1 m.
Keywords :
Mach-Zehnder interferometers; photodetectors; two-photon processes; measurement accuracy; profilometry; scanning frequency range; two-photon absorption; Absorption; Dynamic range; Frequency measurement; Intensity modulation; Light sources; Optical modulation; Optimized production technology;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1274756
