Title :
Ellipsometric characterization of Si nano-particles formed in SiO2 films as an electro-luminescence element
Author :
Kawabata, Shuichi ; Sato, Keisuke ; Izumi, Tomio ; Wakaki, Moriaki
Author_Institution :
Fac. of Eng., Tokyo Polytech. Univ., Japan
Abstract :
An aggregation of Si nano-particles is very attractive due to its potential application to the light emitting devices. Many researches are carrying out their studies intensively in this field. The size and the number density of Si nano-particles formed in the SiO2 film are of most interest and important factors in the fabrication process of the light emitting devices. We have tried to determine the concentration ratio of Si nano-particles dispersed in the SiO2 film by ellipsometry.
Keywords :
electroluminescent devices; elemental semiconductors; ellipsometers; nanoparticles; optical fabrication; optical films; silicon compounds; Si nano-particle; SiO2; SiO2 film; electro-luminescence element; ellipsometric characterization; fabrication process; light emitting device; potential application; Ellipsometry; Fabrication; Glass; Nanoscale devices; Optical films; Optical refraction; Optical variables control; Refractive index; Semiconductor films; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1274785
