• DocumentCode
    405547
  • Title

    Low-threshold lasing of optically pumped InGaN vertical-cavity surface-emitting lasers with dielectric mirrors

  • Author

    Tawara, Takehiko ; Gotoh, Hideki ; Akasaka, Tetsuya ; Kobayashi, Naoki ; Saitoh, Tadashi

  • Author_Institution
    NTT Basic Res. Labs., NTT Corp., Kanagawa, Japan
  • Volume
    1
  • fYear
    2003
  • fDate
    15-19 Dec. 2003
  • Abstract
    III-nitride VCSELs are fabricated by removing SiC substrate from the Ill-nitride cavity, and subsequent wafer bonding of the cavity and DBRs. Low-threshold lasing action in InGaN VCSELs with dielectric DBRs is observed at room temperature by optical pumping.
  • Keywords
    dielectric devices; distributed Bragg reflectors; gallium compounds; indium compounds; laser cavity resonators; optical fabrication; optical pumping; silicon compounds; surface emitting lasers; wafer bonding; wide band gap semiconductors; 293 to 298 K; III-nitride VCSEL fabrication; Ill-nitride cavity; InGaN; SiC; SiC substrate removal; dielectric DBR; dielectric mirrors; low-threshold lasing; optically pumped InGaN vertical-cavity surface-emitting lasers; wafer bonding; Dielectric substrates; Laser excitation; Mirrors; Optical pumping; Pump lasers; Silicon carbide; Surface emitting lasers; Temperature; Vertical cavity surface emitting lasers; Wafer bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
  • Print_ISBN
    0-7803-7766-4
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2003.1274798
  • Filename
    1274798