Title :
Photonic lattices fabricated using Si lithographic processes
Author :
Fleming, J.G. ; Lin, Shawn-Yu
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
This paper will overview our work on the fabrication of photonic crystals using advanced silicon processing techniques. We will discuss the fabrication of three-dimensional silicon structures, metallic three-dimensional structures and dielectric one-dimensional structures.
Keywords :
dielectric materials; elemental semiconductors; optical fabrication; photolithography; photonic band gap; photonic crystals; silicon; Si; dielectric one-dimensional structures; lithographic processes; metallic three-dimensional structures; photonic crystal fabrication; photonic lattices; silicon processing techniques; three-dimensional silicon structures; Laboratories; Lattices; Lighting control; Optical control; Optical device fabrication; Optical devices; Photonic band gap; Photonic crystals; Silicon; Stimulated emission;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277001
