DocumentCode
405658
Title
Non-axial-scanning confocal microscope by membrane mirror shape switching
Author
Yasuno, Yoshiaki ; Wiesendanger, Tobias F. ; Ruprecht, Aiko K. ; Makita, Satoshi ; Yatagai, Toyohiko ; Tiziani, Hans J.
Author_Institution
Inst. of Appl. Phys., Tsukuba Univ., Ibaraki, Japan
Volume
2
fYear
2003
fDate
15-19 Dec. 2003
Abstract
A non-axial-scanning confocal microscope by membrane mirror shape switching has been developed. The system controls the defocus of an objective by membrane mirror, and determines the height of an object from the confocal output value of each defocus.
Keywords
adaptive optics; height measurement; membranes; mirrors; optical focusing; optical microscopes; confocal output value; defocus; membrane mirror; membrane mirror shape switching; nonaxial-scanning confocal microscope; object height; Adaptive control; Biomembranes; Charge coupled devices; Light sources; Microscopy; Mirrors; Programmable control; Shape control; Shape measurement; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN
0-7803-7766-4
Type
conf
DOI
10.1109/CLEOPR.2003.1277006
Filename
1277006
Link To Document