Title :
Development of novel micromechanism for movement translation and out-of-plane displacement amplification
Author :
Lee, Chengkuo ; Lai, Yen-Jyh ; Lin, Yn-Shen ; Ruey-Shing Huang ; Lin, Min-Shyong
Author_Institution :
Asia Pacific Microsystems Inc., Hsinchu, Taiwan
Abstract :
Novel micromechanism is designed and characterized to transfer small in-plane motion or displacement into the out-of-plane amplified rotation or amplified vertical displacement. Preliminary results proved the feasibility of using this micromechanism to optical switch and variable optical attenuator (VOA) applications.
Keywords :
micro-optics; micromechanical devices; optical attenuators; optical design techniques; optical switches; amplified vertical displacement; micromechanism; movement translation; optical switch; out-of-plane amplified rotation; out-of-plane displacement amplification; small in-plane motion; surface micromachined structures; variable optical attenuator; Asia; Fasteners; Micromachining; Microstructure; Optical attenuators; Optical devices; Optical fiber networks; Optical switches; Research and development; Stimulated emission;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277148
