Design and fabrication of curved micromirrors using the MultiPoly process

Author

Mi, Bin ; Kahn, Harold ; Merat, Frank ; Heuer, Arthur H. ; Smith, David A. ; Phillips, Stephen M.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA

Volume

1

fYear

2003

fDate

22-24 Oct. 2003

Firstpage

42

Abstract

This paper presents the design and fabrication of reflective curved micromirrors with pre-determined static shapes. The fabrication of these devices uses conventional surface micromachining technology and the MultiPoly process (Yang et al., 2000), which is a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The inexpensive fabrication of these micromirrors allows for a range of designs that could address many applications, including optical switches.

Keywords

adaptive optics; chemical vapour deposition; micromachining; micromechanical devices; micromirrors; multilayers; LPCVD polysilicon; MultiPoly process; adaptive optics; conventional surface micromachining technology; multilayer deposition; overall stress; pre-determined static shapes; reflective curved micromirrors; stress gradient; Biomedical optical imaging; Fabrication; Micromechanical devices; Micromirrors; Mirrors; Nonhomogeneous media; Optical switches; Shape control; Stress control; Tensile stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2003. Proceedings of IEEE

Print_ISBN

0-7803-8133-5

Type

conf

DOI

10.1109/ICSENS.2003.1278892

Filename

1278892