Title :
Fabrication of arrays of artificial hairs for complex flow pattern recognition
Author :
van Baar, J.J. ; Dijkstra, M. ; Wiegerink, R.J. ; Lammerink, T.S.J. ; Krijnen, G.J.M.
Author_Institution :
MESA+ Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
We present monolithically integrated high-density arrays of artificial hairs for flow pattern measurements based on drag force. A combined bulk/surface micromachining process has been developed to integrate the artificial hairs with capacitive read-out. First fabrication results show the possibility to fabricate out-of-plane hairs without reverting to micro-assembly technologies. This enables realisation of high-density arrays of symmetrical sensors with two-dimensional sensitivity.
Keywords :
arrays; flow; microassembling; micromachining; pattern recognition; sensors; arrays fabrication; artificial hairs; capacitive read-out; drag force; flow pattern measurements; flow pattern recognition; flow sensors; lifelike perception; microassembly technologies; micromachining process; symmetrical sensors; Chromium; Fabrication; Force measurement; Hair; Magnetic fields; Magnetic sensors; Micromachining; Pattern recognition; Sensor arrays; Sputter etching;
Conference_Titel :
Sensors, 2003. Proceedings of IEEE
Print_ISBN :
0-7803-8133-5
DOI :
10.1109/ICSENS.2003.1278952
