Optical microsensors integrated on a silicon chip

Author

Higurashi, Eiji ; Sawada, Renshi

Author_Institution

Dept. of Precision Eng., Tokyo Univ., Japan

Volume

1

fYear

2003

fDate

22-24 Oct. 2003

Firstpage

665

Abstract

The hybrid integration of various optical microcomponents, such as laser diodes, photodiodes, and gratings, on a silicon micromachined substrate by passive optical alignment (optical surface mount technology) has opened up many new possibilities in constructing highly functional, reliable, and low-cost optical microsensors. Using this technology, various microsensors, including a high-resolution encoder that can measure the displacement or revolution angle and a blood flow sensor that can monitor blood flow in human skin, have been developed.

Keywords

angular measurement; blood flow measurement; displacement measurement; microsensors; optical sensors; blood flow sensor; displacement measurement; high-resolution encoder; laser diodes; optical gratings; optical microcomponents; optical microsensors; optical surface mount technology; passive optical alignment; photodiodes; revolution angle measurement; silicon chip; silicon micromachined substrate; Blood flow; Diode lasers; Fluid flow measurement; Gratings; Integrated optics; Microsensors; Optical sensors; Photodiodes; Silicon; Surface-mount technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2003. Proceedings of IEEE

Print_ISBN

0-7803-8133-5

Type

conf

DOI

10.1109/ICSENS.2003.1279021

Filename

1279021