• DocumentCode
    406091
  • Title

    Coupling of MEMS ultrasonic transducers

  • Author

    Greve, D.W. ; Oppenheim, I.J.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
  • Volume
    2
  • fYear
    2003
  • fDate
    22-24 Oct. 2003
  • Firstpage
    814
  • Abstract
    MEMS ultrasonic transducers are potentially valuable in both medical and non-destructive testing applications. A prime advantage of these transducers is their wide bandwidth together with the potential for economical fabrication of detector arrays. In this paper, we discuss issues related to the coupling of these transducers to solid and liquid media. We will show that appropriate choice of the coupling medium thickness is required in order to prevent spurious pulses.
  • Keywords
    micromechanical devices; ultrasonic transducers; MEMS ultrasonic transducers; coupling; detector arrays; spurious pulses; wide bandwidth; Bandwidth; Biomedical transducers; Detectors; Fabrication; Medical tests; Micromechanical devices; Nondestructive testing; Sensor arrays; Solids; Ultrasonic transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2003. Proceedings of IEEE
  • Print_ISBN
    0-7803-8133-5
  • Type

    conf

  • DOI
    10.1109/ICSENS.2003.1279056
  • Filename
    1279056
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=406091