Title :
Coupling of MEMS ultrasonic transducers
Author :
Greve, D.W. ; Oppenheim, I.J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
MEMS ultrasonic transducers are potentially valuable in both medical and non-destructive testing applications. A prime advantage of these transducers is their wide bandwidth together with the potential for economical fabrication of detector arrays. In this paper, we discuss issues related to the coupling of these transducers to solid and liquid media. We will show that appropriate choice of the coupling medium thickness is required in order to prevent spurious pulses.
Keywords :
micromechanical devices; ultrasonic transducers; MEMS ultrasonic transducers; coupling; detector arrays; spurious pulses; wide bandwidth; Bandwidth; Biomedical transducers; Detectors; Fabrication; Medical tests; Micromechanical devices; Nondestructive testing; Sensor arrays; Solids; Ultrasonic transducers;
Conference_Titel :
Sensors, 2003. Proceedings of IEEE
Print_ISBN :
0-7803-8133-5
DOI :
10.1109/ICSENS.2003.1279056
