Title :
Sub-10-nm electronics
Author :
Likharev, Konstantin K.
Author_Institution :
Stony Brook Univ., NY, USA
Abstract :
This paper reviews the future electron devices (SET,MOSFET), circuits fabrication and CMOS technology.
Keywords :
CMOS integrated circuits; MOSFET; nanoelectronics; 10 nm; CMOS technology; MOSFET; circuits fabrication; electron devices; nanoelectronics; nanofabrication; CMOS technology; Circuits; Costs; Electron devices; FETs; Fabrication; Impurities; Nanoscale devices; Neuromorphics; Silicon;
Conference_Titel :
Electron Devices and Solid-State Circuits, 2003 IEEE Conference on
Print_ISBN :
0-7803-7749-4
DOI :
10.1109/EDSSC.2003.1283474
