• DocumentCode
    407551
  • Title

    Sub-10-nm electronics

  • Author

    Likharev, Konstantin K.

  • Author_Institution
    Stony Brook Univ., NY, USA
  • fYear
    2003
  • fDate
    16-18 Dec. 2003
  • Firstpage
    19
  • Abstract
    This paper reviews the future electron devices (SET,MOSFET), circuits fabrication and CMOS technology.
  • Keywords
    CMOS integrated circuits; MOSFET; nanoelectronics; 10 nm; CMOS technology; MOSFET; circuits fabrication; electron devices; nanoelectronics; nanofabrication; CMOS technology; Circuits; Costs; Electron devices; FETs; Fabrication; Impurities; Nanoscale devices; Neuromorphics; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Solid-State Circuits, 2003 IEEE Conference on
  • Print_ISBN
    0-7803-7749-4
  • Type

    conf

  • DOI
    10.1109/EDSSC.2003.1283474
  • Filename
    1283474
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=407551