Electrical characteristics of barium-strontium titanate thin-film capacitor

Author

Bin Li ; Lai, P.T. ; Chen, Ping ; Huang, M.Q. ; Li, G.Q.

Author_Institution

Dept. of Appl. Phys., South China Univ. of Technol., Guangzhou, China

fYear

2003

fDate

16-18 Dec. 2003

Firstpage

67

Lastpage

70

Abstract

The electrical characteristics of barium-strontium titanate (Ba_1-xSr_xTiO₃) thin-film capacitor are investigated and the effects of oxygen annealing conditions (annealing time and annealing temperature) on dielectric constant are studied. Experimental results show that the dielectric constant of the thin film decreases with increasing annealing time, but increases with increasing annealing temperature. These facts can be explained by the microstructure analysis and the polarization theory.

Keywords

annealing; barium compounds; capacitance; crystal microstructure; dielectric polarisation; ferroelectric capacitors; ferroelectric ceramics; ferroelectric thin films; permittivity; strontium compounds; thin film capacitors; Al-Ba_1-xSr_xTiO₃-SiO₂-Si; barium-strontium titanate thin-film capacitor; dielectric constant; electrical properties; microstructure; oxygen annealing; polarization theory; Annealing; Capacitors; Dielectric constant; Dielectric thin films; Electric variables; Microstructure; Strontium; Temperature; Titanium compounds; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices and Solid-State Circuits, 2003 IEEE Conference on

Print_ISBN

0-7803-7749-4

Type

conf

DOI

10.1109/EDSSC.2003.1283485

Filename

1283485