DocumentCode :
407554
Title :
Electrical characteristics of barium-strontium titanate thin-film capacitor
Author :
Bin Li ; Lai, P.T. ; Chen, Ping ; Huang, M.Q. ; Li, G.Q.
Author_Institution :
Dept. of Appl. Phys., South China Univ. of Technol., Guangzhou, China
fYear :
2003
fDate :
16-18 Dec. 2003
Firstpage :
67
Lastpage :
70
Abstract :
The electrical characteristics of barium-strontium titanate (Ba1-xSrxTiO3) thin-film capacitor are investigated and the effects of oxygen annealing conditions (annealing time and annealing temperature) on dielectric constant are studied. Experimental results show that the dielectric constant of the thin film decreases with increasing annealing time, but increases with increasing annealing temperature. These facts can be explained by the microstructure analysis and the polarization theory.
Keywords :
annealing; barium compounds; capacitance; crystal microstructure; dielectric polarisation; ferroelectric capacitors; ferroelectric ceramics; ferroelectric thin films; permittivity; strontium compounds; thin film capacitors; Al-Ba1-xSrxTiO3-SiO2-Si; barium-strontium titanate thin-film capacitor; dielectric constant; electrical properties; microstructure; oxygen annealing; polarization theory; Annealing; Capacitors; Dielectric constant; Dielectric thin films; Electric variables; Microstructure; Strontium; Temperature; Titanium compounds; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices and Solid-State Circuits, 2003 IEEE Conference on
Print_ISBN :
0-7803-7749-4
Type :
conf
DOI :
10.1109/EDSSC.2003.1283485
Filename :
1283485
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=407554
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