Thin film formation-a fabrication on non-planar surface by spray coating method

Author

Ichiki, Masaaki ; Zhang, Lulu ; Yang, Zhen ; Ikehara, Tsuyoshi ; Maeda, Ryutaro

Author_Institution

Nat. Inst. of Adv. Ind. Sci. & Technol, Tsukuba, Japan

fYear

2003

fDate

5-7 May 2003

Firstpage

300

Lastpage

303

Abstract

This paper presents a three-dimensional micro fabrication and integration technology of smart materials for MEMS by spray coating method. It is shown that SCM is proved most effective in additional deposition on non-planar surface. PZT film is formed both on flat and non-flat surface and its thickness is around 1 μm. Perovskite structure is formed in suitable heat treatment. Ferroelectric P-E hysteresis loop is also obtained. This paper is the first report on deposition of smart materials for MEMS with use of spray coating method from our group and also other researchers. Spray coating method has been proposed for three-dimensional coating method. It is also possible for spray coating method to deposit piezoelectrics, pyroelectrics, magnetics, etc., for sensor and/or actuator after improvement of system construction. Hydrophilic and hydrophobic properties between substrate surface and ejected liquid are most essential process factor of spray coating method in order to improve the film growth condition.

Keywords

crystal structure; dielectric hysteresis; ferroelectric materials; ferroelectric thin films; heat treatment; intelligent materials; lead compounds; micromechanical devices; permittivity; spray coatings; MEMS; PZT; PZT film; PbZrO3TiO3; Si; actuator; deposition; ferroelectric hysteresis loop; heat treatment; hydrophobic properties; integration technology; magnetics; nonplanar surface; perovskite structure; piezoelectrics; pyroelectrics; sensor; smart materials; spray coating; thin film formation; three-dimensional coating; three-dimensional micro fabrication; Coatings; Fabrication; Ferroelectric films; Ferroelectric materials; Heat treatment; Magnetic hysteresis; Micromechanical devices; Spraying; Surface treatment; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on

Print_ISBN

0-7803-7066-X

Type

conf

DOI

10.1109/DTIP.2003.1287057

Filename

1287057