Title :
Thin film SnO2-based gas sensors fabricated using sol-gel method for the detection of ethanol
Author :
Esfandyarpour, B. ; Mohajerzadeh, S. ; Khodadadi, A. ; Makki, B. Sadeghi
Author_Institution :
Dept. of Electr. Comput. Eng., Tehran Univ., Iran
Abstract :
Thin films of SnO2 were prepared by a sol-gel technique using tin tetrachloride (SnCl4) and isopropyl alcohol solution. Applying standard lithography process, high sensitivity SnO2 gas sensors were miniaturized on macromachined Si(100) substrates. Conductivity measurements of the films annealed at different temperatures have been carried out in dry air and in the presence of 5 ppm to 100 ppm ethanol. Response and recovery times of the sensors annealed at 550°C at the optimum operating temperature were found to be about 5 and 40 seconds, respectively. Also sensitivity of the sensors was studied towards 500 ppm CO and 1000 ppm H2 at different temperatures, indicating the satisfactory selectivity for ethanol.
Keywords :
annealing; chemical variables measurement; electric admittance measurement; gas sensors; microsensors; semiconductor devices; semiconductor materials; semiconductor thin films; sol-gel processing; tin compounds; 40 sec; 5 sec; 550 degC; Si; SnO2; annealing; conductivity measurement; ethanol detection; high sensitivity SnO2 gas sensors; lithography process; macromachined Si(100) substrates; optimum operating temperature; sol-gel method; thin film SnO2-based gas sensor; Annealing; Conductive films; Conductivity measurement; Ethanol; Gas detectors; Lithography; Substrates; Temperature sensors; Tin; Transistors;
Conference_Titel :
Microelectronics, 2003. ICM 2003. Proceedings of the 15th International Conference on
Print_ISBN :
977-05-2010-1
DOI :
10.1109/ICM.2003.1287748
