Title :
Characterization of ferroelectric capacitors over wide frequency range
Author :
Supriyanto, Eko ; Goebel, Holger
Author_Institution :
Inst. of Electron., Univ. of Fed. Armed Forces Hamburg, Humburg, Germany
Abstract :
In this paper the transient response measurement method is presented which allows the characterization of ferroelectric capacitors for signal slew rates up to 800 MV/s. This method completes the Quasi Static Capacitance Voltage (QSCV) measurement and the Sawyer Tower measurement which is suitable for low and medium frequencies. The comparison of the results obtained by different measurement methods show the usability of the presented method.
Keywords :
bismuth compounds; capacitance; coercive force; dielectric hysteresis; dielectric polarisation; dielectric relaxation; ferroelectric capacitors; ferroelectric materials; ferroelectric thin films; permittivity; strontium compounds; thin film capacitors; transient response; Sawyer Tower measurement; SrBi2Ta2O9; quasistatic capacitance voltage measurement; signal slew rates; transient response measurement method; wide frequency range ferroelectric capacitors; Capacitance measurement; Capacitance-voltage characteristics; Capacitors; Dielectric measurements; Ferroelectric materials; Frequency measurement; Hysteresis; Polarization; Transient response; Voltage;
Conference_Titel :
Microelectronics, 2003. ICM 2003. Proceedings of the 15th International Conference on
Print_ISBN :
977-05-2010-1
DOI :
10.1109/ICM.2003.1287805
