DocumentCode :
408485
Title :
Characterization of digitally compensated, large displacement comb drive
Author :
Mahmoud, M.S. ; Khalil, D. ; El-Hagry, M.T. ; Badr, M.A.
Author_Institution :
Electron. Res. Inst., Nat. Res. Center, Cairo, Egypt
fYear :
2003
fDate :
9-11 Dec. 2003
Firstpage :
295
Lastpage :
298
Abstract :
In this article, we discussed a digital compensation technique to improve the transient response of the comb drive actuator. Linear comb actuator are very important MEMS structures that are widely used in many applications.
Keywords :
microactuators; MEMS; comb drive actuator; digital compensation technique; transient response; Acceleration; Accelerometers; Actuators; Drives; Fingers; Mathematical model; Resonance; Signal design; Transient response; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronics, 2003. ICM 2003. Proceedings of the 15th International Conference on
Print_ISBN :
977-05-2010-1
Type :
conf
DOI :
10.1109/ICM.2003.1287814
Filename :
1287814
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=408485
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