DocumentCode
408485
Title
Characterization of digitally compensated, large displacement comb drive
Author
Mahmoud, M.S. ; Khalil, D. ; El-Hagry, M.T. ; Badr, M.A.
Author_Institution
Electron. Res. Inst., Nat. Res. Center, Cairo, Egypt
fYear
2003
fDate
9-11 Dec. 2003
Firstpage
295
Lastpage
298
Abstract
In this article, we discussed a digital compensation technique to improve the transient response of the comb drive actuator. Linear comb actuator are very important MEMS structures that are widely used in many applications.
Keywords
microactuators; MEMS; comb drive actuator; digital compensation technique; transient response; Acceleration; Accelerometers; Actuators; Drives; Fingers; Mathematical model; Resonance; Signal design; Transient response; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 2003. ICM 2003. Proceedings of the 15th International Conference on
Print_ISBN
977-05-2010-1
Type
conf
DOI
10.1109/ICM.2003.1287814
Filename
1287814
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