DocumentCode
408506
Title
Extended Oxide-Trap extraction method to low frequencies for irradiated MOS transistors
Author
Djezzar, Boualem ; Smatti, Abderrazak ; Oussalah, Slimane
Author_Institution
Microelectron. Lab, CDTA, Algiers, Algeria
fYear
2003
fDate
9-11 Dec. 2003
Firstpage
387
Lastpage
390
Abstract
We present an extraction of the OTCP (Oxide-Trap based on Charge-Pumping method from high frequencies (HF) to low frequencies (LF). Thus using the LF-OTCP method, the interface-trap and border-trap are simultaneously involved in charge pumping (CP) current (Icp) measurements. We have found that radiation-induced oxide-trap (ΔNot) is only dependent on ΔVth (threshold voltage shift). ΔIcpm,h (augmentation of maximum CP current at high frequencies), and ΔIcpm,l (augmentation of maximum CP current at low frequencies). Where δIcpm,l and ΔIcpm,h can be easily obtained from vertical shift of charge pumping curve at low and high frequencies respectively, and ΔVth from lateral one.
Keywords
MOSFET; electric current measurement; elemental semiconductors; radiation effects; semiconductor device models; silicon; silicon compounds; Si-SiO2; charge-pumping current measurements; interface-trap; irradiated MOS transistors; radiation-induced oxide-trap; Charge measurement; Charge pumps; Current measurement; Frequency measurement; Hafnium; Laboratories; MOSFETs; Microelectronics; Threshold voltage; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 2003. ICM 2003. Proceedings of the 15th International Conference on
Print_ISBN
977-05-2010-1
Type
conf
DOI
10.1109/ICM.2003.1287845
Filename
1287845
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