Large-strain, piezoelectric, in-plane micro-actuator

Author

Conway, Nicholas J. ; Kim, Sang-Gook

Author_Institution

Dept. of Mech. Eng., Massachusetts Inst. of Technol., Cambridge, MA, USA

fYear

2004

fDate

2004

Firstpage

454

Lastpage

457

Abstract

A new type of high-force, large-displacement, low-voltage piezoelectric actuator has been developed using a compact stroke amplifying mechanism. The device is fabricated using an SU-8 structure as an amplifying mechanism for thin-film PZT. Each actuator "cell" can be arrayed in series and/or in parallel and the design can accommodate different force/displacement requirements. Peak static force of the design tested was 55 μN, and peak static displacement was 1.18 μm at 10 V. Fabricated devices consisting of three actuators in series were tested, which showed a strain amplification ratio in excess of 10:1 per cell.

Keywords

lead compounds; microactuators; piezoelectric actuators; piezoelectric materials; piezoelectric thin films; 1.18 micron; 10 V; PZT; PbZrO3TiO3; actuator cells; amplifying mechanism; piezoelectric microactuator; piezoelectric thin films; static force; strain amplification ratio; Capacitive sensors; Couplings; Electrostatic actuators; Fabrication; Microactuators; Micromechanical devices; Piezoelectric actuators; Piezoelectric films; Silicon; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Print_ISBN

0-7803-8265-X

Type

conf

DOI

10.1109/MEMS.2004.1290620

Filename

1290620