Title :
Influence of non-uniform strain on characteristics of one-port SAW resonators
Author :
Kalinin, Victor ; Leigh, Arthur
Author_Institution :
Transense Technol. plc, Bicester, UK
Abstract :
A one-port SAW resonator with a non-uniform strained substrate is studied both experimentally and theoretically. Apart from the expected variation of the resonant frequency due to static strain and noticeable variation of the resonant value of S11 the emergence of a parasitic mode is also observed. Modelling explain this phenomenon and helps to predict a reduction of the sensitivity to strain due to its non-uniformity.
Keywords :
circuit resonance; sensitivity analysis; stress effects; substrates; surface acoustic wave resonators; nonuniform strained substrate; one-port SAW resonators; parasitic mode; resonant frequency; sensitivity reduction; static strain; Capacitive sensors; Force sensors; Frequency response; Mechanical sensors; Predictive models; Programmable control; Resonance; Resonant frequency; Sensor phenomena and characterization; Surface acoustic waves;
Conference_Titel :
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN :
0-7803-7922-5
DOI :
10.1109/ULTSYM.2003.1293168
