• DocumentCode
    410130
  • Title

    Influence of non-uniform strain on characteristics of one-port SAW resonators

  • Author

    Kalinin, Victor ; Leigh, Arthur

  • Author_Institution
    Transense Technol. plc, Bicester, UK
  • Volume
    2
  • fYear
    2003
  • fDate
    5-8 Oct. 2003
  • Firstpage
    1412
  • Abstract
    A one-port SAW resonator with a non-uniform strained substrate is studied both experimentally and theoretically. Apart from the expected variation of the resonant frequency due to static strain and noticeable variation of the resonant value of S11 the emergence of a parasitic mode is also observed. Modelling explain this phenomenon and helps to predict a reduction of the sensitivity to strain due to its non-uniformity.
  • Keywords
    circuit resonance; sensitivity analysis; stress effects; substrates; surface acoustic wave resonators; nonuniform strained substrate; one-port SAW resonators; parasitic mode; resonant frequency; sensitivity reduction; static strain; Capacitive sensors; Force sensors; Frequency response; Mechanical sensors; Predictive models; Programmable control; Resonance; Resonant frequency; Sensor phenomena and characterization; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics, 2003 IEEE Symposium on
  • Print_ISBN
    0-7803-7922-5
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2003.1293168
  • Filename
    1293168
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=410130