Title :
High-temperature stability of LiNbO3 based SAW devices
Author :
Hauser, R. ; Reindl, L. ; Biniasch, J.
Author_Institution :
Carinthian Tech. Res. AG, Villach, Austria
Abstract :
The high temperature stability of SAW (surface acoustic wave) devices based on LiNbO3 is investigated in this paper for high temperature applications up to 400° C. Driven by the need for high temperature application based on sophisticated SAW technology, for temperature measurement and identifying a pressure sensor inside of a combustion engine, LiNbO3 has been examined, regarding a low cost solution and mass production. Using a high temperature oven and a network analyzer the acoustic attenuation loss and the aging of the devices have been observed. The aging and demolition of substrates and metalizations have been investigated in detail to make an estimation of the economic lifetime. Finally this paper shows the capability of LiNbO3 based SAW devices for temporary usage in high-temperature applications.
Keywords :
acoustic wave absorption; ageing; lithium compounds; pressure sensors; substrates; surface acoustic wave devices; temperature measurement; thermal stability; LiNbO3; LiNbO3 based SAW device; acoustic attenuation loss; aging; combustion engine; high temperature oven; high temperature stability; mass production; metalization; network analyzer; pressure sensor; substrates; surface acoustic wave; temperature measurement; Acoustic sensors; Acoustic waves; Aging; Combustion; Engines; Stability; Surface acoustic wave devices; Surface acoustic waves; Temperature measurement; Temperature sensors;
Conference_Titel :
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN :
0-7803-7922-5
DOI :
10.1109/ULTSYM.2003.1293386
