Detection and localization of subsurface defects in DLC films by acoustic microscopy

Author

Zinin, Pavel V. ; Berezina, Sofia ; Fei, Dong ; Rebinsky, Douglas A. ; Lemor, Robert M. ; Weiss, Eike C. ; Arnoud, Caron ; Arnold, Walter ; Koehler, Bernd

Author_Institution

SOEST, Hawaii Univ., Honolulu, HI, USA

Volume

1

fYear

2003

fDate

5-8 Oct. 2003

Firstpage

881

Abstract

A high frequency scanning acoustic microscope (SAM) operating at 1-1.3 GHz was used to investigate subsurface defects in diamond-like carbon (DLC) films that were 2-3 μm thick. Because the wavelength of the longitudinal wave in the film was comparable to the film thickness, the acoustical images obtained were near-field images. To interpret the features in the acoustical images, a multidisciplinary approach was utilized through the combination of SAM with atomic force microscopy (AFM), focused ion beam (FIB) technique, surface Brillouin spectroscopy (SBS), and optical microscopy.

Keywords

acoustic microscopy; atomic force microscopy; chromium; diamond-like carbon; focused ion beam technology; optical microscopy; thin films; 1 to 1.3 GHz; 2 to 3 micron; AFM; Cr-C; DLC films; FIB; acoustical images; atomic force microscopy; diamond-like carbon; film thickness; focused ion beam technique; frequency scanning acoustic microscopy; longitudinal wave; near field images; optical microscopy; subsurface defects detection; surface Brillouin spectroscopy; Acoustic signal detection; Atom optics; Atomic beams; Atomic force microscopy; Diamond-like carbon; Focusing; Frequency; Ion beams; Optical films; Optical microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics, 2003 IEEE Symposium on

Print_ISBN

0-7803-7922-5

Type

conf

DOI

10.1109/ULTSYM.2003.1293540

Filename

1293540