Title :
Tunable photonic-bandgap microcavity waveguides at 1.55 /spl mu/m
Author :
Wong, Chee Wei ; Rakich, Peter T. ; Johnson, Steven G. ; Qi, Minghao ; Jeon, Yongbae ; Barbastathis, George ; Kim, Sang-Gook
Author_Institution :
Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
We have designed and fabricated tunable photonic-bandgap microcavities in optical waveguides, with strain modulation via thin-film piezoelectric actuators on deformable membranes. Cavity resonance tunability, with nanometer lattice control, is designed through perturbation on FDTD computations. Device fabrication integrates X-ray nanolithography, piezoelectric microactuators and bulk micromachining.
Keywords :
X-rays; cavity resonators; finite difference time-domain analysis; microactuators; microcavities; micromachining; nanolithography; optical design techniques; optical fabrication; optical tuning; optical waveguides; perturbation theory; photonic band gap; piezoelectric actuators; thin film devices; 1.55 micron; FDTD computation; X-ray nanolithography; bulk micromachining; cavity resonance tunability; deformable membrane; nanometer lattice control design; optical waveguides; perturbation; piezoelectric microactuators; strain modulation; thin-film piezoelectric actuators; tunable photonic-bandgap microcavity waveguide; Biomembranes; Capacitive sensors; Microcavities; Optical design; Optical films; Optical modulation; Optical waveguides; Piezoelectric actuators; Piezoelectric films; Resonance;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
