• DocumentCode
    411803
  • Title

    Large area, high speed InGaAs thin film MSMs for heterogeneously integrated optoelectronies

  • Author

    Seo, S.W. ; Shen, J.J. ; Jokerst, N.M. ; Brown, A.S.

  • Author_Institution
    School of Electrical and Computer Engineering, Georgia Institute of Technology
  • fYear
    2003
  • fDate
    6-6 June 2003
  • Firstpage
    457
  • Lastpage
    460
  • Keywords
    Dark current; Detectors; Etching; Fingers; High speed optical techniques; Indium gallium arsenide; Optical films; Photodetectors; Substrates; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2003. CLEO '03. Conference on
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    1-55752-748-2
  • Type

    conf

  • Filename
    1297887
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=411803