Title :
MOCVD grown solar-blind photodetector arrays
Author :
Chowdhury, Uttiya ; Collins, Charles J. ; Wong, Michael M. ; Zhu, Ting Gang ; Denyszyn, Jonathan C. ; Choi, Jin-Ho ; Campbell, Joe C. ; Hairston, Allen ; Lamarre, Phil ; Wong, Kwok K. ; Cooke, Chris ; Mullarkey, John ; Reine, Marion ; Dupuis, Russell D.
Author_Institution :
Microelectron. Res. Center, Texas Univ., Austin, TX, USA
Abstract :
We report on the growth and fabrication of back-illuminated solar-blind photodetector array based on the AlGaN material system using low-pressure metalorganic chemical vapor deposition. Discrete photodetector devices exhibited a high external quantum efficiency of 58% and 256/spl times/256 photodetector arrays exhibited a high operability of >99%.
Keywords :
III-V semiconductors; MOCVD; aluminium compounds; optical arrays; optical fabrication; photodetectors; vapour phase epitaxial growth; wide band gap semiconductors; AlGaN; AlGaN material system; MOCVD; back-illumination; discrete photodetector devices; low-pressure metalorganic chemical vapor deposition; quantum efficiency; solar-blind photodetector arrays; Absorption; Aluminum gallium nitride; Chemical vapor deposition; Lighting; MOCVD; Optical arrays; Optical device fabrication; P-i-n diodes; Photodetectors; Power supplies;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
