Title :
Generation of photonic crystal patterns by single-spot electron beam lithography
Author :
Kim, S. ; Chong, H. ; De La Rue, R.M. ; Marsh, J.H. ; Bryce, A.C.
Author_Institution :
Dept. of Electron. & Electr. Eng., Glasgow Univ., UK
Abstract :
A new method of patterning photonic crystal (PhC) structures by single-spot electron-beam exposure scheme is presented. An order-of-magnitude reduction in the required job time compared to that for the conventional multispot scheme has been achieved.
Keywords :
electron beam lithography; optical fabrication; photonic crystals; job time; multi-spot scheme; patterning photonic crystal structure; photonic crystal pattern; single-spot electron beam lithography; Electron beams; Holography; Lithography; Optical device fabrication; Photonic crystals; Resists; Scanning electron microscopy; Telephony; Testing; Writing;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
