DocumentCode :
411965
Title :
A single-crystal silicon-based micromirror with large scanning angle for biomedical applications
Author :
Xie, Huikai ; Jain, Ankur ; Xie, Tuqiang ; Pan, Yingtian ; Fedder, Gary K.
Author_Institution :
University of Florida
fYear :
2003
fDate :
6-6 June 2003
Firstpage :
858
Lastpage :
860
Keywords :
Actuators; Application software; Biomedical computing; Biomedical engineering; Biomedical imaging; Etching; Micromirrors; Mirrors; Silicon; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
Type :
conf
Filename :
1298114
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=411965
