Title :
Vertical integration of silica and electro-optic polymer waveguides using grayscale lithography
Author :
Chang, Daniel H. ; Azfar, Talal ; Fetterman, H.R. ; Zhang, Cheng ; Steier, William H.
Author_Institution :
UCLA Dept. of Electrical Engineering
Keywords :
Gray-scale; High speed optical techniques; Integrated optics; Lithography; Optical waveguides; Planar waveguides; Polymers; Probes; Resists; Silicon compounds;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
