DocumentCode :
412265
Title :
Evaluation of complex optical constants of semiconductor wafers using terahertz ellipsometry
Author :
Nagashima, Takeshi ; Hangyo, Masanori
Author_Institution :
Osaka University
fYear :
2003
fDate :
6-6 June 2003
Firstpage :
1565
Lastpage :
1566
Keywords :
Antenna measurements; Conductivity; Ellipsometry; Frequency dependence; Optical pulse generation; Optical pulses; Optical reflection; Polarization; Spectroscopy; Time measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
Type :
conf
Filename :
1298416
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=412265
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