DocumentCode
412265
Title
Evaluation of complex optical constants of semiconductor wafers using terahertz ellipsometry
Author
Nagashima, Takeshi ; Hangyo, Masanori
Author_Institution
Osaka University
fYear
2003
fDate
6-6 June 2003
Firstpage
1565
Lastpage
1566
Keywords
Antenna measurements; Conductivity; Ellipsometry; Frequency dependence; Optical pulse generation; Optical pulses; Optical reflection; Polarization; Spectroscopy; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
1-55752-748-2
Type
conf
Filename
1298416
Link To Document