Topography correlation - a powerful tool applied to the visualisation of remote plasma hydrogen passivation effects

Author

Rinio, M. ; Hause, A. ; Moller, H.J.

Author_Institution

Fraunhofer-Inst. fur Solare Energiesysteme, Gelsenkirchen, Germany

Volume

1

fYear

2003

fDate

18-18 May 2003

Firstpage

118

Abstract

We present a mathematical method for correlation of two topograms based on a coordinate transformation. The method is used to calculate high-resolution topograms of the normalised recombination strength /spl Gamma/ of the dislocations, by correlating light beam induced current maps with dislocation density maps. Topograms of the ratio of the IQE after and before microwave induced remote plasma hydrogen passivation (MIRHP) are presented. The passivation effect at dislocations is monitored through /spl Gamma/-topograms for temperatures of the MIRHP process between 300/spl deg/C and 375/spl deg/C.

Keywords

dislocations; hydrogen; passivation; plasma materials processing; surface topography; /spl Gamma/-topogram; 300 to 375 degC; Si:H; coordinate transformation; dislocation; dislocation density map; light beam induced current map; microwave induced remote plasma hydrogen passivation; normalised recombination strength; remote plasma hydrogen passivation effect; topography correlation;

fLanguage

English

Publisher

ieee

Conference_Titel

Photovoltaic Energy Conversion, 2003. Proceedings of 3rd World Conference on

Conference_Location

Osaka, Japan

Print_ISBN

4-9901816-0-3

Type

conf

Filename

1305234