Title :
Microcrystalline silicon solar cells grown at 20-30 a/s by high-pressure silane-depletion plasma
Author :
Matsui, Takuya ; Kondo, Michio ; Matsuda, Akihisa
Author_Institution :
National Institute of Advanced Industrial Science and Technology
Conference_Titel :
Photovoltaic Energy Conversion, 2003. Proceedings of 3rd World Conference on
Conference_Location :
Osaka, Japan
Print_ISBN :
4-9901816-0-3