Thin film solar modules based on amorphous and microcrystalline silicon

Author

Repmann, Tobias ; Sehrbrock, Brigitte ; Zahren, Christoph ; Siekmann, Hilde ; Muller, Joachim ; Rech, Bemd ; Psyk, Walter ; Geyer, Robert ; Lechne, Peter

Author_Institution

Inst. of Photovoltaics, Forschungszentrum Julich GmbH, Germany

Volume

2

fYear

2003

fDate

18-18 May 2003

Firstpage

1574

Abstract

We succeeded in preparing a-Si:H//spl mu/c-Si:H solar cells on 30/spl times/30 cm/sup 2/ substrate size using high rate 13.56 MHz PECVD processes. Stable cell efficiencies up to 11.2% were achieved on textured ZnO as front TCO. First solar modules were realised by applying an industrially established technology for patterning and back contact preparation. These modules showed initial aperture area efficiencies (689 cm/sup 2/) up to 9.7% using SnO/sub 2/ coated glass substrates. In parallel, a new process technology for the development of a-Si:H//spl mu/c-Si:H solar modules on glass started operation at the Institute of Photovoltaics. On 30/spl times/30 cm/sup 2/ substrate size initial aperture area module efficiencies of 10.1% were demonstrated by using texture-etched ZnO:Al coated glass substrates.

Keywords

amorphous semiconductors; elemental semiconductors; plasma CVD; semiconductor growth; semiconductor thin films; silicon; solar cells; 13.56 MHz; PECVD processes; Si:H; amorphous silicon; aperture area module efficiency; back contact preparation; cell efficiency; etching; microcrystalline silicon; photovoltaics; solar cells; textured ZnO; thin film solar modules;

fLanguage

English

Publisher

ieee

Conference_Titel

Photovoltaic Energy Conversion, 2003. Proceedings of 3rd World Conference on

Conference_Location

Osaka, Japan

Print_ISBN

4-9901816-0-3

Type

conf

Filename

1306228