Improvement of light-trapping effect on microcrystalline silicon solar cells by using high haze transparent conductive oxide films

Influences of shape and haze value of textured TCO (transparent conductive oxide) films on the light-trapping effect of microcrystalline silicon (/spl mu/c-Si) thin film solar cells were investigated. The pyramidal shaped surface texture with high haze value was found to show the lowest cell reflectance in the longer wavelength region by using computer simulation. The Jsc of the /spl mu/c-Si single junction thin film solar cell (i-layer thickness of 0.5 /spl mu/m) fabricated on the pyramidal textured TCO with 40% haze increased by 16% as compared with the cell using the 13% haze TCO, which indicates the light-trapping is effectively improved by using high haze TCO films.