Co-axis type non-contact impedance sensor

Conventional non-contact impedance sensors cause an essential sensing error in principle due to the intersection angle between the line of force probing and the sensing axis of distance sensor, especially for the environment with distributed compliance. To cope with the issue, we propose the co-axis type non-contact impedance sensor that can provide us with the accurate impedance parameters of environment. The key design is that we give the common axis for both force probing and distance sensor, so that we can obtain the exact displacement of environment. Experimental results are also shown for confirming the effectiveness of the proposed sensor.