Title :
Characterization of Pd-H2 thin films irradiated by UV laser
Author :
Doria, D. ; Filippo, E. ; Di Giulio, M. ; Lorusso, A. ; Manno, D. ; Nassisi, V. ; Pedone, A.
Author_Institution :
Dept. of Phys., Lecce Univ., Italy
Abstract :
We present the performance of Pd films with hydrogen and processed by an excimer laser. The laser fluence was lower than 25 mJ/cm2 and the initial hydrogen pressure was 5 bar. SEM and EDX analysis showed morphological modifications and the presence of grains containing new elements.
Keywords :
X-ray chemical analysis; excimer lasers; hydrogen; laser beam effects; optical films; palladium; scanning electron microscopy; ultraviolet radiation effects; 5 bar; EDX analysis; Pd-H2; Pd-H2 thin film; SEM; UV laser irradiation; excimer laser; hydrogen pressure; Indium tin oxide; Transistors;
Conference_Titel :
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN :
0-7803-7734-6
DOI :
10.1109/CLEOE.2003.1313652